Rotary electrostatic microactuator
US6847151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2002 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Sep 11, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A balanced microdevice that includes a substrate and at least one comb drive assembly having first and second comb drive members. The first comb drive member is mounted on the substrate and the second comb drive member overlies the substrate. At least one spring member is provided that has a first end portion coupled to the substrate and a second end portion coupled to the second comb drive member. The first comb drive member has a plurality of spaced-apart first comb drive fingers and the second comb drive member has a plurality of spaced-apart second comb drive fingers. The second comb drive member is movable between a first position in which the first and second comb drive fingers are not substantially fully interdigitated and a second position in which the first and second comb drive fingers are substantially fully interdigitated. A counterbalance is carried by the substrate and coupled to the second comb drive member for inhibiting undesirable movement of the second comb drive member in response to externally applied accelerations to the microdevice.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.