Illuminator for inspecting substantially flat surfaces
US6847442B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 1998 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Jun 16, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Illuminator apparatus for illuminating a workpiece during visual testing thereof, the illuminator comprising: a source of illumination that illuminates a portion of the workpiece with on-axis illumination centered at a first angular direction and having a first intensity and with off-axis illumination having a second intensity; and an optical viewing system, that views said portion of the workpiece and accepts light reflected from the workpiece over a range of angular directions, centered at a second angular direction, said range of angular directions defining said on-axis illumination, wherein said first intensity and second intensity art separately adjustable and wherein the first angular direction is different from the second angular direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.