Acoustic wave sensor apparatus, method and system using wide bandgap materials

US6848295B2 · kind B2 · utility

Assignee

• Wayne State University · US

Inventors

• Gregory W. Auner · Livonia, US
• Feng Zhong · Troy, US
• Chantelle Hughes · Troy, US
• Gina Shreve · Ann Arbor, US
• Hao Ying · Kunshan, CN

Key dates

• Filing date: Apr 17, 2002
• Grant date: Feb 1, 2005
• Expiry date: Apr 17, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02631
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acoustic wave sensor to detect an analyte, the sensor comprising a piezoelectric material including a wide bandgap semiconductor material grown using plasma source molecular beam epitaxy.