Six degree-of-freedom micro-machined multi-sensor
US6848304B2 · kind B2 · utility
121Cited by
16References
29Claims
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Key dates
| Filing date | Jun 17, 2003 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | Jun 17, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/082
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A six degree-of-freedom micro-machined multi-sensor that provides 3-axes of acceleration sensing, and 3-axes of angular rate sensing, in a single multi-sensor device. The six degree-of-freedom multi-sensor device includes a first multi-sensor substructure providing 2-axes of acceleration sensing and 1-axis of angular rate sensing, and a second multi-sensor substructure providing a third axis of acceleration sensing, and second and third axes of angular rate sensing. The first and second multi-sensor substructures are implemented on respective substrates within the six degree-of-freedom multi-sensor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.