Pressure sensor having metallic diaphragm seal joint

US6848318B2 · kind B2 · utility

Assignee

• Endress+Hauser Inc. · DE

Inventors

• Peter Gerst · Weil am Rhein, DE
• Karlheinz Banholzer · Eschborn, DE
• Karl Flögel · Schopfheim, DE
• Thomas Uehlin · Schopfheim, DE
• Frank Hegner · Bad Kötzting, DE
• Elke Schmidt · Bad Säckingen, DE
• Ulfert Drewes · Bad Hersfeld, DE
• Rainer Martin · Bochum, DE

Key dates

• Filing date: Jan 23, 2004
• Grant date: Feb 1, 2005
• Expiry date: Jan 23, 2024

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor that is particularly suitable inter alia for the food industry and the measuring accuracy of which is stable over a long time, having a diaphragm seal (3, 45) with a separating diaphragm (7, 53) on which a pressure (P) to be measured acts and having a ceramic measuring cell (9, 57) which is connected to the diaphragm seal (3, 45) exclusively by inorganic materials, is provided, in which sensor the separating diaphragm (7, 53) and all further sensor components coming into contact during measurement with a medium of which the pressure (P) is to be measured are metallic.