Fresh air ducts including downstream filters for clean rooms
US6849100B2 · kind B2 · utility
13Cited by
21References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 16, 2002 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | Oct 16, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D50/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A fresh air duct is configured to direct fresh air filtered by an air conditioning system towards a clean room downstream from the fresh air duct, the fresh air having a first level of particle density. A separate particle filter in the fresh air duct, located downstream from the air conditioning system and upstream from the clean room, is configured to further filter the fresh air to provide filtered fresh air having a second level of particle density therein that is less than the first level. Related methods are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.