Evaporation apparatus
US6849832B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 4, 2004 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | May 4, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/26
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
When electric current is caused to flow in an electric heater which is disposed on an elongated crucible, an evaporation material stored within the crucible and located under the electric heater is heated and the evaporation material is vaporized and discharged through an opening of the electric heater. Because a metal coating is applied to the outer surface of the elongated crucible, external radiation of heat from the crucible is reduced, and the heat generated by the electric heater is more efficiently used to increase the temperature of the evaporation material. In this manner, efficient heating for the interior of the elongated crucible and uniform temperature within the crucible can be achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.