Barber pole structure for magnetoresistive sensors and method of forming same
US6850057B2 · kind B2 · utility
9Cited by
2References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2001 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | Dec 13, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12958
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of making a magnetorestrictive sensor involves the deposition of a magnetorestrictive strip over a substrate, the deposition of an insulating layer over the magnetorestrictive strip, the etching of barber pole windows through the insulating layer, the deposition of a conductive material over the insulating layer and into the barber windows, and the etching away of the conductive material between the barber pole windows so as to form barber poles. In this manner, the formation of the barber poles is controlled by the windows formed in the insulating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.