Intensity-based optical waveguide sensor
US6850315B1 · kind B1 · utility
1Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1999 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | Aug 25, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/241
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to polymeric/semiconductor thin film strain gauges comprising visible light from spectrometer (10) which is directed onto a thin film passive sensor (12) having a transparent glass substrate (14) and a laminated construction in succession from the substrate (14), of a polyimide layer(18a) a polysiloxane layer (16a) filled with alumina particles, a polyimide layer (18b) and a polysiloxane layer (16b) filled with alumina particles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.