Base, payload and connecting structure and methods of making the same
US6850675B1 · kind B1 · utility
51Cited by
28References
47Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 4, 2002 |
| Grant date | Feb 1, 2005 |
| Priority date | — |
| Expiry date | May 10, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/003
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Micromachined passive alignment assemblies and methods of using and making the same are provided. The alignment assemblies are used to align at least one optical element. The alignment assemblies may be configured with kinematic, pseudo-kinematic, redundant or degenerate support structures. One alignment assembly comprises a base and a payload, which supports at least one optical element. The payload may be coupled to the base via connecting structures. The base, the payload and/or the connecting structures may have internal flexure assemblies for preloading a connection, thermal compensation and/or strain isolation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.