Cantilever for scanning probe microscope
US6851301B2 · kind B2 · utility
14Cited by
12References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 2002 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | May 21, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.