Patent · US Expired

Polishing composition and polishing method employing it

US6852009B2 · kind B2 · utility

18Cited by
11References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 1, 2002
Grant dateFeb 8, 2005
Priority date—
Expiry dateMay 6, 2022

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC09G1/02
  • WIPO fieldBasic materials chemistry
  • WIPO sectorChemistry

Abstract

A polishing composition which comprises the following components (a) to (d):

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.