Epitaxial oxide films via nitride conversion
US6852160B2 · kind B2 · utility
2Cited by
15References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 2003 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | Jul 28, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B33/005
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to oxides on suitable substrates, as converted from nitride precursors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.