Optical device, mold, and method of producing the same
US6852420B2 · kind B2 · utility
3Cited by
7References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 4, 2001 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | May 19, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/1852
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
According to the present invention, there is provided a mold constituted by an electrically conductive thin plate having a predetermined surface shape, and an electrically insulating reinforcement material, wherein the electrically conductive thin plate and the electrically insulating reinforcement material are bonded to each other by an anodic bonding method. Particularly, the electrically conductive thin plate is preferably formed out of silicon single crystalline and the electrically insulating reinforcement material is preferably oxide glass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.