Process of fabricating electro-optic polymer devices with polymer sustained microelectrodes
US6852563B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2004 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | Jan 21, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2201/12
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A process for fabricating an electro-optic device is decribed that includes: a) providing a substrate comprising at least two polymer micro-ridges, where each polymer micro-ridge comprises an upper surface and two walls, and the two walls form an angle with a lower surface; b) depositing a metal thin film on the upper surface, the two walls, and the lower surface; c) etching a predetermined amount of the deposited metal thin film on the lower surface, thereby forming two electrodes separated by a gap; d) depositing a nonlinear optical polymer in the gap between the two electrodes; and e) poling the nonlinear optical polymer to induce electro-optic activity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.