Gap adjustment apparatus and gap adjustment method for adjusting gap between two objects
US6852988B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 27, 2001 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | Nov 27, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/682
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A first stage and a second stage are disposed to face each other. A first object is fixed on the first stage. A first displacement sensor attached on the first stage is used to measure a distance extending from the first displacement sensor to a plane disposed in front of the first displacement sensor. A second object is fixed on the second stage. A second displacement sensor attached on the second stage is used to measure a distance extending from the second displacement sensor to a plane disposed in front of the second displacement sensor. A moving mechanism is provided to move one of the first stage and the second stage, with the movement of one stage being relative to the other stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.