Self-assembled nanobump array stuctures and a method to fabricate such structures
US6853075B2 · kind B2 · utility
22Cited by
31References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 28, 2003 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | Jan 28, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/889
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A self-assembled nanobump array structure including a semi-absorbing outer layer provided on at least one nanobump-forming substrate layer, the semi-absorbing outer layer configured to ablate slowly to allow an applied laser energy to be transmitted to the at least one nanobump-forming substrate layer, in which the self-assembled nanobump array structure is formed by an energy and a pressure buildup occurring in the at least one nanobump-forming substrate layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.