Method and apparatus for sensing a temperature along an optical path with a grating in semiconductor material
US6853759B2 · kind B2 · utility
1Cited by
6References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2003 |
| Grant date | Feb 8, 2005 |
| Priority date | — |
| Expiry date | Jul 28, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12135
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A temperature sensing and control method and apparatus. In one aspect of the present invention, an apparatus according to the teachings of the present invention includes an optical path disposed in semiconductor material, a grating disposed in the optical path, and a thermal probe including an optical sensor optically coupled to the grating to sense a spectral response of the grating. The thermal probe is adapted to determine a temperature of the optical path in which the grating is disposed in response to the spectral response of the grating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.