Fluidic device with integrated capacitive micromachined ultrasonic transducers
US6854338B2 · kind B2 · utility
111Cited by
11References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 12, 2001 |
| Grant date | Feb 15, 2005 |
| Priority date | — |
| Expiry date | Jul 12, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides fluidic devices and systems which have micromachined ultrasonic transducers integrated into microchannels. The ultrasonic transducers generate and receive ultrasonic waves. The transducers can be disposed and operated to measure fluid characteristics such as pressure, density, viscosity, flow rate and can also be used to mix and pump fluids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.