Systems and methods for overcoming stiction
US6856068B2 · kind B2 · utility
33Cited by
16References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2002 |
| Grant date | Feb 15, 2005 |
| Priority date | — |
| Expiry date | Jul 31, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3584
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moved to a desired location.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.