Method and circuit for detecting movements through micro-electric-mechanical sensors, compensating parasitic capacitances and spurious movements
US6856144B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 20, 2002 |
| Grant date | Feb 15, 2005 |
| Priority date | — |
| Expiry date | Sep 26, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Method for detecting movements through a micro-electric-mechanical sensor, having a fixed body and a moving mass, forming at least one first and one second detection capacitor, connected to a common node and to a first, respectively a second detection node and having a common detection capacitance at rest and a capacitive unbalance in case of a movement. The method includes the steps of: feeding the common node with a constant detection voltage of predetermined duration; generating a feedback voltage to maintain the first and the second detection node at a constant common mode voltage; generating a compensation electric quantity, inversely proportional to the common detection capacitance at least in one predetermined range; supplying the compensating electric quantity to the common node; and detecting an output quantity related to the capacitive unbalance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.