Position detecting apparatus, and optical apparatus and position detecting method comprising this
US6856477B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 29, 2003 |
| Grant date | Feb 15, 2005 |
| Priority date | — |
| Expiry date | Jul 29, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/366
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention discloses a position detecting apparatus that can suppress the decrease of position detection accuracy. The position detecting apparatus includes a position sensor outputting position detecting signals which have different phases respectively that change periodically according to the movement of an object, and a phase converting unit generating phase converted signals which have different phases respectively by giving predetermined phase differences to the plurality of position detecting signals. In addition, the position detecting apparatus further includes a first calculating unit obtaining first position data corresponding to a position of the object based on the plurality of position detecting signals, and a second calculating unit obtaining second position data corresponding to a position of the object based on the plurality of phase converted signals. Furthermore, the position detecting apparatus further includes a third calculating unit obtaining a position of the object based on the first and the second position data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.