MEMS variable inductor and capacitor
US6856499B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 28, 2003 |
| Grant date | Feb 15, 2005 |
| Priority date | — |
| Expiry date | Mar 28, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2007/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.