Process for cleaning a glass-coating reactor using a reactive gas

US6857433B2 · kind B2 · utility

Assignee

• AIR PRODUCTS AND CHEMICALS, INC. · US

Inventors

• Philip Bruce Henderson · Allentown, US
• Mario Joseph Moniz · Emmaus, US
• Andrew David Johnson · Doylestown, US
• Eugene Joseph Karwacki, Jr. · Orefield, US
• Richard R. Bodette · Kingsport, US
• Christopher R. Cording · Kingsport, US
• Herbert David Johnson · Kingsport, US

Key dates

• Filing date: Jul 22, 2002
• Grant date: Feb 22, 2005
• Expiry date: Dec 31, 2022

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/905
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A process for cleaning a glass-coating reactor includes: (a) providing the reactor to be cleaned, wherein the reactor contains a glass substrate within a chamber and the chamber has an internal surface coated with at least one substance selected from the group consisting of Si3N4 or SiO2; (b) terminating a flow of a deposition gas to the reactor; (c) adding to the reactor at least one cleaning gas to react with the at least one substance to form at least one volatile product; and (d) removing from the reactor the at least one volatile product.