Tunable CVD diamond structures
US6858080B2 · kind B2 · utility
57Cited by
26References
45Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 24, 2002 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Dec 24, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24942
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Monocrystalline diamond, adapted for use as in applications such as semiconductor devices, optical waveguides, and industrial applications, in the form of a single crystalline diamond structure having one or more diamond layers, at least one of which is formed by a CVD process. The diamond layers are “lattice-matched” or “lattice-mismatched” to each other to provide a desired level of strain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.