Tension mask assembly for use in vacuum deposition of thin film of organic electroluminescent device
US6858086B2 · kind B2 · utility
45Cited by
12References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 20, 2002 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Apr 24, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/164
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask frame assembly used in vacuum deposition of thin films of an organic electroluminescent device. The mask frame assembly includes a frame having an opening and at least two unit masks which each have at least one unit masking pattern portion in the direction of the unit mask and two edges which are fixed to the frame under tension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.