Surface acoustic wave devices based on unpolished nanocrystalline diamond
US6858969B2 · kind B2 · utility
7Cited by
21References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2003 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Jan 13, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/02582
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Surface Acoustic Wave (SAW) devices with an unpolished or nominally polished nanocrystalline diamond film, metal electrodes and piezoelectric composition coatings are described. The devices are used as radio frequency and microwave filters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.