Patent · US Expired

Micromechanical optical switch

US6859301B1 · kind B1 · utility

52Cited by
53References
27Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 19, 2004
Grant dateFeb 22, 2005
Priority date
Expiry dateMay 19, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH04Q2011/0077
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.