Digital micromirror device having a window transparent to ultraviolet (UV) light
US6859311B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2003 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | May 12, 2023 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61F9/013
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A UV-transmissable window assembly for a DMD device includes a UV-transmissable glass window provided in a frame. The window and frame are bonded together to preferably effect a hermetic seal therebetween. Optical coatings specific to the intended wavelength of light transmission are applied to the inner and outer surfaces of the glass window to reduce reflection and increase light transmission therethrough. The window assembly, and DMD provided with the same, is adapted for excellent transmission of ultraviolet light, even at the deep ultraviolet portion of the spectrum. The DMD window assembly has application in the medical arts, both surgery and device manufacture, in the production of integrated circuits (IC), and in other optical lithography applications, among other fields.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.