Methods and systems for controlling movement within MEMS structures
US6860151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 7, 2003 |
| Grant date | Mar 1, 2005 |
| Priority date | — |
| Expiry date | Feb 7, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for reducing undesired movements of proof masses in micro-electromechanical systems (MEMS) devices is described where the proof masses are suspended above a substrate by one or more suspensions. The method includes providing an anchor on the substrate substantially between a first proof and suspensions for the first proof mass and a second proof mass and suspensions for the second proof mass, coupling a first portion of a beam to the first proof mass, coupling a second portion of the beam to the second proof mass, and attaching a third portion of the beam to the anchor, the third portion extending between the first portion and second portion of the beam, the anchor and the third portion configured to allow for rotation about an axis perpendicular to the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.