Apparatus for manufacturing ultra-fine particles using electrospray device and method thereof
US6860434B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Apr 18, 2001 |
| Grant date | Mar 1, 2005 |
| Priority date | — |
| Expiry date | Oct 10, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05B1/14
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method for manufacturing ultra-fine particles using an electrospray device is disclosed. One or more capillary provided at its tip with a nozzle is positioned within a guide duct and precursors such as metal organic materials and metal halogen compounds, or nonvolatile substances or volatile substances are supplied to the capillary. Voltages are applied to the capillary and the guide duct, respectively, so that a voltage difference is generated therebetween and the highly charged liquid droplets from the capillary are sprayed. The sprayed liquid droplets are carried along the guide duct together with carrier gas injected into the guide duct. When heat energy is applied to the liquid droplets, chemical reactions of the liquid droplets occur. A collecting plate positioned in front of the guide duct collects ultra-fine particles formed by the chemical reactions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.