Patent · US Expired

Depth measurement and depth control or automatic depth control for a hollow to be produced by a laser processing device

US6861616B1 · kind B1 · utility

1Cited by

4References

9Claims

0Family size

Assignee

LASERTEC CORPORATION · JP

Inventors

Michael Kuhl · Hafenhofen, DE
Peter Wrba · Unterthingau, DE
Peter Hildebrand · Pfronten, DE
Martin Reisacher · Kempten, DE

Key dates

Filing date	Sep 30, 1999
Grant date	Mar 1, 2005
Priority date	—
Expiry date	Sep 30, 2019

Classification

Technology area (CPC G)Physics
CPC primaryG01B11/22
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

According to a method for a depth measurement the depths of measuring points on a calibration surface are measured and correction values depending on differences between the measured values and known values are used and stored for a later correction. According to a method for the layer-wise production of a hollow the horizontal boundaries (xg, yg) for the removal of a layer (Si+1) depending on the hollow depth (z) were determined from the shape definition of the hollow. The measured values can be continuously stored and used for a later control of the laser processing device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.