Microfabricated ultrasonic transducer with suppressed substrate modes
US6862254B2 · kind B2 · utility
2Cited by
13References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 3, 2001 |
| Grant date | Mar 1, 2005 |
| Priority date | — |
| Expiry date | Oct 3, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B2201/76
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides a microfabricated acoustic transducer with suppressed substrate modes. The modes are suppressed by either thinning the substrate such that a longitudinal ringing mode occurs outside of the frequency band of interest or by applying a judiciously designed damping material on the backside of the transducer substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.