DLL circuit taking acount of external load
US6862490B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | May 24, 2000 |
| Grant date | Mar 1, 2005 |
| Priority date | — |
| Expiry date | May 24, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67028
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Apparatus (10) for performing patterned cleaning of substrate surfaces (11) includes substrate (11), energetic beam (12) directed to the substrate (11), material carrier element (14) having a deposition layer (16), and a control unit (8) operating the apparatus (10) in either a “material removal” or a “material transfer” mode in a predetermined sequence. In the “material removal” mode, the following steps are followed which include the material carrier element (14) from the intersection with the energy beam (12) and allowing impinging of the energy beam (12) on the surface of the substrate in a predetermined patterned fashion so that the material of the substrate is disintegrated at predetermined locations of the substrate surface (11). After the first cleaning, the control unit (18) changes the mode of the operation to the “material transfer” by moving the material carrier element (14) into position intersecting with the energy beam (12) so that the material of the deposition layer (16) is deposited on the surface of the substrate (11).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.