In-situ randomization and recording of wafer processing order at process tools

US6862495B2 · kind B2 · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Randolph W. Kahn · McKinney, US
• Kenneth G. Vickers · Whitesboro, US
• Richard L. Guldi · Dallas, US
• Edward J. Leonard · Richardson, US
• Yaojian Leng · Vancouver, US

Key dates

• Filing date: Dec 4, 2003
• Grant date: Mar 1, 2005
• Expiry date: Dec 4, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/137
• WIPO field: Control
• WIPO sector: Instruments

Abstract

Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.