Anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity
US6864324B2 · kind B2 · utility
1Cited by
19References
44Claims
0Family size
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Key dates
| Filing date | Apr 19, 2002 |
| Grant date | Mar 8, 2005 |
| Priority date | — |
| Expiry date | Jul 11, 2022 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC08F2800/20
- WIPO fieldMacromolecular chemistry, polymers
- WIPO sectorChemistry
Abstract
An anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity comprising the steps of polymerization, purification, transesterification, purification, catalyst removal, and solvent exchange. The resultant polymer in solution can be used directly, without further processing steps, to prepare a photoresist composition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.