Method and apparatus for fabricating self-assembling microstructures
US6864570B2 · kind B2 · utility
171Cited by
111References
131Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jun 8, 2001 |
| Grant date | Mar 8, 2005 |
| Priority date | — |
| Expiry date | Jul 22, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/978
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for assembling microstructures onto a substrate through fluid transport. The microstructures being shaped blocks self-align into recessed regions located on a substrate such that the microstructure becomes integral with the substrate. The improved method includes a step of transferring the shaped blocks into a fluid to create a slurry. Such slurry is then dispensed evenly or circulated over the top surface of a substrate having recessed regions thereon. The microstructure via the shape and fluid tumbles onto the surface of the substrate, self-aligns, and engages into a recessed region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.