Patent · US Expired

Via plug adapter

US6864577B2 · kind B2 · utility

7Cited by
14References
25Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 26, 2002
Grant dateMar 8, 2005
Priority date
Expiry dateApr 26, 2022

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02P70/50
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A circuit includes a substrate having a dielectric layer with a first surface and a second surface. A conductive layer is formed on the first surface. A beveled via is formed in a dielectric layer of the substrate. The via has a first opening of a first width in the first surface, and a second opening of a second width in the second surface, the second width being greater than the first width. A conductive plug is connected to the conductive layer. The plug is formed in the via and extends from adjacent the first opening toward the second opening, and terminates adjacent the second opening at a plug interface surface. A conductive solder ball is connected to the plug interface surface and extends to protrude from the second surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.