Matrix type actuator
US6864620B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2001 |
| Grant date | Mar 8, 2005 |
| Priority date | — |
| Expiry date | Dec 5, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49833
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A matrix type piezoelectric/electrostrictive (PIE) actuator includes a plurality of piezoelectric/electrostrictive elements, each including a piezoelectric/electrostrictive body and at least one pair of electrodes formed on a ceramic substrate. The matrix type P/E actuator is activated by displacement of the piezoelectric/electrostrictive bodies. The piezoelectric/electrostrictive elements are joined to the ceramic substrate as respective unified bodies, and are two-dimensionally arranged independently from each other. The piezoelectric/electrostrictive actuator provides a greater displacement with a lower voltage, a high responsive speed, and a greater generating force, as well as enhancing the mounting ability and the integration. A method for manufacturing such a matrix type P/E actuator is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.