Patent · US Expired

Zoom system for an illumination device

US6864960B2 · kind B2 · utility

8Cited by

12References

65Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Jess Koehler · Markdorf, DE
Johannes Wangler · Oberkochen, DE

Key dates

Filing date	Sep 5, 2002
Grant date	Mar 8, 2005
Priority date	—
Expiry date	Sep 5, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70183
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A zoom system for an illumination device of a microlithographic projection exposure system is configured in the form of a focal-length zoom lens. The lenses of the zoom system define an object plane (6) and an image plane (8) that is a Fourier transform of the object plane. The zoom system is characterized by a large expansion of the illuminated area in the image plane, where expansion factors (D) in excess of four are feasible and are obtained by employing lens groups (33, 36) that are movable over large moving ranges.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.