Clean room system
US6867682B2 · kind B2 · utility
27Cited by
12References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 17, 1996 |
| Grant date | Mar 15, 2005 |
| Priority date | — |
| Expiry date | May 17, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/25257
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A clean room system has filter-fan units each having at least one fan motor and being connected to an electric network. At least one central control unit is provided. A connecting bus system for connecting the filter-fan units to one another and to the at least one central control unit is provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.