Patent · US Expired

High-frequency electron source

US6870321B2 · kind B2 · utility

3Cited by
9References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 9, 2003
Grant dateMar 22, 2005
Priority date
Expiry dateJun 8, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J3/025
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A high-frequency electron source includes a discharge chamber having at least one gas inlet for a gas to be ionized and at least one extraction opening for electrons. The high-frequency electron source also includes a first electrode at least partially surrounding the discharge chamber and a keeper electrode at least partially surround the discharge chamber. The first electrode and the keeper electrode are configured to provide a high-frequency electric field therebetween.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.