System and method for evaluating the planarity and parallelism of an array of probe tips
US6870382B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 3, 2002 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | May 3, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system includes a support member and a computer system. The support member holds and retains a probe card, which has an array of probe tips extending therefrom. The computer system includes a software program. The software causes the computer system to perform a method including the following. A position where electrical contact occurs between at least some of the probe tips of the probe tip array and a selected surface is determined through testing. Data for the positions where electrical contact occurs is recorded. The recorded data is sorted for a shortest distance where electrical contact occurred between each probe tip tested and the selected surface during the testing. The sorted data group is plotted on a three dimensional cartesian coordinate system. The system may be used for evaluating the planarity of the probe tip array and parallelism of the probe tip array relative to the selected surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.