Method and apparatus for measuring sheet resistance
US6870386B1 · kind B1 · utility
1Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2003 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Oct 23, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A resistance measurement circuit includes a plurality of current sources, a plurality of resistor strings and a comparator. Each resistor string is coupled in series with a respective one of the current sources and includes a plurality of nodes with different resistances relative to a reference node. Each node in each resistor string has a different resistance relative to the reference node than corresponding nodes in the other resistor strings. The comparator has a first comparison input coupled to a reference voltage and a second comparison input selectively coupled to the plurality of nodes in each resistor string.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.