Measurement head for atomic force microscopy and other applications

US6871527B2 · kind B2 · utility

Assignee

• The Regents of the University of California · US

Inventors

• Paul K. Hansma · Isla Vista, US
• Barney Drake · Truckee, US
• James A. Thompson · Logan, US
• Johannes Kindt · Weimar, DE
• David K. Hale · McLean, US

Key dates

• Filing date: Jul 17, 2002
• Grant date: Mar 29, 2005
• Expiry date: Jan 6, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q20/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An improvement for atomic force microscopes, more generally for light beam detecting systems, but also in part applicable to scanning probe microscopes, providing significant novel features and advantages. Particular features include using different objective lens regions for incident and reflected light, a flexure that allows three dimensional motion of the optics block, forming the housing and optics block of a composite material or ceramic, arranging the components so that the beam never hits a flat surface at normal incidence, and providing a resonant frequency of cantilever vibration greater than 850 HZ between the cantilever and sample and the cantilever and focusing lens.