Patent · US Expired

Pressure sensor module with sensor cell and adapter

US6871546B2 · kind B2 · utility

21Cited by

11References

13Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Heiko Scheurich · Stuttgart, DE
Martin Mast · Gerlingen, DE
Berthold Rogge · Stuttgart, DE
Masoud Habibi · Schwieberdingen, DE

Key dates

Filing date	Feb 14, 2002
Grant date	Mar 29, 2005
Priority date	—
Expiry date	Mar 25, 2022

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2224/48091
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

In a pressure sensor module according to the prior art, which is intended for detecting the pressure of a corrosive medium, the conventional sensor cell with a pressure sensor chip is modified in order to protect it from corrosion, which results in a large volume for a pressure-transmitting-fluid. This is disadvantageous for the calibration and for a high degree of measurement precision.In a pressure sensor module (1) according to the invention, a convention sensor cell (5) is used that has an adapter (21) connected to it, which has a very small volume for a pressure-transmitting medium.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.