Method of fabrication of electronic devices using microfluidic channels

US6872588B2 · kind B2 · utility

Assignee

• Palo Alto Research Center Incorporated · US

Inventors

• Michael L. Chabinyc · Mountain View, US
• William S. Wong · Redwood City, US
• Robert A. Street · Palo Alto, US
• Kateri E. Paul · Medford, US

Key dates

• Filing date: Nov 22, 2002
• Grant date: Mar 29, 2005
• Expiry date: Jan 5, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K10/462

Abstract

A structure and method of using microfluidic channels to form an array of semiconductor devices is described. The microfluidic channels have been found to be particularly useful when formed in a self aligned process and used to interconnect a series of thin film transistor (TFT) devices.