System and method for determining a dielectric property associated with a substrate
US6873162B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 5, 2003 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Nov 5, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K1/024
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for determining the dielectric properties associated with a substrate. In one embodiment, a network analyzer measures scattering parameters for at least two lines of substantially identical cross-section embedded within the substrate over a specified frequency range. A first engine determines a complex propagation constant based on the scattering parameters and defines the complex propagation constant in terms of an attenuation component and a phase component. A second engine, responsive to the phase component, determines a relative permittivity parameter associated with the substrate over the specified frequency range. A third engine, responsive to the attenuation component and the relative permittivity parameter, performs a least squares analysis to determine a loss tangent parameter associated with the substrate over the specified frequency range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.