MEMS millimeter wave switches
US6873223B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 2002 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Dec 16, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01P1/127
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
An RF switch useable up to millimeter wave frequencies and higher frequencies of 30 GHz and above. Four embodiments of the invention are configured as ground switches. Two of the ground switch embodiments are configured with a planar air bridge. Both of these embodiments are configured so that the bridge length is shortened between the transmission line and ground by introducing grounded stops. The other two ground switch embodiments include an elevated metal seesaw. In these embodiments, a shortened path to ground is provided with relatively low inductance by proper sizing and positioning of the seesaw structure. Lastly, broadband power switch embodiment is configured to utilize only a small portion of the air bridge to carry the signal. The relatively short path length results in a relatively low inductance and resistance lowers the RF power loss of the switch, thereby increasing the RF power handling capability of the switch.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.