Method and apparatus for three-dimensional compositional mapping of heterogeneous materials
US6873419B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2001 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Nov 30, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/718
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Laser ablation combined with spectrometric analysis is a good tool for determining the composition of heterogeneous materials. By measuring the depth of an ablation crater at a target of a heterogeneous material, it is possible to generate a compositional profile as a function of the depth. It is also possible to generate a 3 dimensional profile by depth profiling of a plurality of craters. The depth measurement is conducted in situ and in real time so that the evolution of composition as a function of the depth can be measured. An interferometric technique with a short coherence length light is one of the preferred embodiments for measuring the depth in situ and in real time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.